Tuuryo.PVD
1. Daahan dahaarka ah ee Magnetron aad ayuu uga fiican yahay daahan arc ion, waxaana jira qaybo dhibco ah oo ka yar.
2. Awood xidhidhiyaha substrate-ka filimku wuu ka fiican yahay kan dahaarka uumiga. In technology daahan uumiga vacuum ah, tamarta atamka ee lakabka filimka waa tamarta kulaylka kaliya ee lagu qaado inta lagu guda jiro uumiga, taas oo u dhiganta 00.1 ~ 0.2eV; halka tignoolajiyada daahan ee magnetron sputtering, tamarta qaybaha lakabka filimka waxaa soo saara ions argon iyo atamka dusha sare ee bartilmaameedka. Wax-is-weydaarsiga iyo is-weydaarsiga xawliga ah waxay hagaajin karaan xoogga isku-xidhka xuub-saldhigga.
3. Halabuurka lakabka filimku wuxuu ku dhow yahay walxaha bartilmaameedka ah. Lakabka filimka ee magnetron sputtering ayaa laga soo tuuray bartilmaameedka by argon ions, iyo ka kooban lakabka filimku wuxuu aad ugu dhow yahay walxaha bartilmaameedka ah. Dhacdada "jajabinta" ama "kala-goynta" ee ka dhalanaysa waa mid fudud marka la barbar dhigo uumiga. Si kastaba ha ahaatee, guud ahaan marka la daboolo filim shaqeynaya oo leh shuruudo waxqabad oo aad u adag, qadar gaar ah oo gaas falgal ah waa in lagu daraa inta lagu jiro habka xajinta si loo sameeyo isku-dhafka filimka filimka ee buuxinaya saamiga stoichiometric si loo hubiyo shuruudaha waxqabadka filimka.
4. Dahaarka ayaa leh waxqabad daahan oo wanaagsan. Cadaadiska faakuumka ee dahaarka sputtering waa hooseeyaa. Jidka bilaashka ah ee molecules gaasku waa gaaban yahay, suurtogalnimada isku dhacu waa mid aad u sarreeya, marka la barbardhigo uumiga uumiga, awoodda firdhinta qaybaha filimku waa mid xooggan, waxqabadka daboolka ayaa wanaagsan, dhumucda filimkuna waa lebis.
5. Bartilmaameedku waa il daahan nooca aagga. Dhererka labada diyaaradda Magnetron ee bartilmaameedka sputtering iyo bartilmaameedka cylindrical magnetron waxay gaari karaan 300 ~ 3000 mm. Inkasta oo labaduba ay yihiin ilo daahan toosan, oo ay weheliyaan dhaqdhaqaaqa joogtada ah ee workpiece, waxaa lagu dabooli karaa aag ballaaran oo qaybo ah. Haddii filim lagu dahaadho dusha dhalada ah oo ballaciisu yahay 3300mm, lakabka filimka lebiska ah ee midabada kala duwan iyo gudbinta ayaa la heli karaa. Tuurista Magnetron ayaa si weyn loogu isticmaalay soo xaraynta filimada khafiifka ah ee meelaha waaweyn.
6. U isticmaal korantada eexda qaybta shaqada. Marka hore, tignoolajiyada xajinta ee Magnetron. Maalmahan, tignoolajiyada daahan magnetron sputtering waxaa si weyn loo isticmaalaa on substrates biraha, iyo codsanaya danab eex ah taban in workpiece si loo hagaajiyo tayada lakabka filimka ayaa noqday technology caadiga ah ee daahan filimada functional gaar ah iyo-dhamaadka sare alaabta qurxinta.
