Gusohora.PVD

1. Ipfundikanya ya Magnetron ni nziza cyane kuruta arc ion, kandi hariho uduce duto duto duto.

2. Imbaraga za firime-substrate zihuza ziruta iz'ububiko bwa vacuum. Muri tekinoroji yo gutwika vacuum, ingufu za atome ziri murwego rwa firime ni ingufu zubushyuhe zitwarwa mugihe cyo guhumeka, bihwanye na 00.1 ~ 0.2eV; mugihe muri magnetron sputtering coating tekinoroji, ingufu za firime ibice bya firime zikorwa na argon ion hamwe na atome yo hejuru yintego. Guhana no guhanahana imbaraga birashobora guteza imbere membrane-base ihuza imbaraga.

3. Ibigize ibice bya firime byegeranye nibikoresho bigenewe. Igice cya firime ya magnetron isohoka isohoka kuva kuntego na argon ion, kandi ibice bigize firime byegeranye cyane nibyerekanwe. Ibintu bivamo "gucikamo ibice" cyangwa "kubora" biroroshye cyane ugereranije no guhumeka. Ariko, mubisanzwe, mugihe utwikiriye firime ikora hamwe nibisabwa bikenewe cyane, hagomba kongerwaho umubare munini wa gaze ya reaction mugihe cyo gutera akabariro kugirango firime igizwe na firime yujuje igipimo cya stoichiometric kugirango harebwe ibisabwa muri firime.

4. Igipfundikizo gifite imikorere myiza yo gutwikira. Umuvuduko wa vacuum wo guswera ni muto. Inzira yubusa ya molekile ya gaze ni ngufi, impanuka zishobora kugongana ni nyinshi, kandi ugereranije no gutwikisha umwuka, ubushobozi bwo gutatanya ibice bya firime birakomeye, imikorere ya coating ni nziza, kandi ubunini bwa firime burasa.

5. Intego yo gusohora ni agace kerekana isoko. Uburebure bwindege zombi Magnetron isunika intego hamwe na magnetron ya silindrike irashobora kugera kuri 300 ~ 3000 mm. Nubwo byombi ari umurongo utwikiriye isoko, ufatanije no gukomeza kugenda kwakazi, birashobora gutwikirwa ahantu hanini h'ibice. Niba firime yashizwe hejuru yikirahure gifite ubugari bwa 3300mm, hashobora kuboneka urwego rumwe rwa firime ifite amabara atandukanye hamwe nogukwirakwiza. Imashini ya Magnetron yakoreshejwe cyane mukubitsa ahantu hanini cyane.

6. Koresha bias voltage kumurimo wakazi. Ubwa mbere, muri tekinoroji ya Magnetron. Muri iki gihe, tekinoroji ya magnetron ikoreshwa cyane ku byuma byifashishwa mu byuma, kandi gukoresha ingufu za bias zitari nziza ku kazi kugira ngo ubuziranenge bw’imiterere ya firime bibe ikoranabuhanga nyamukuru ryo gutwikira firime zidasanzwe zikora n’ibicuruzwa byo mu rwego rwo hejuru.