1>. Umwuka
Umwuka wa Vacuum, byitwa guhumeka, bivuga uburyo bwo gutumura ibintu bitwikiriye (cyangwa ibikoresho bya firime) no kubyuka muburyo bumwe bwo gushyushya no guhumeka mubihe bya vacuum, kandi ibice biguruka hejuru yubutaka kugirango bikore firime. Guhumeka ni tekinoroji ya mbere kandi ikoreshwa cyane muburyo bwo kubika imyuka, ifite ibyiza byuburyo bworoshye bwo gukora firime, ubuziranenge bwinshi no guhuzagurika kwa firime yoroheje, hamwe nimiterere idasanzwe ya firime nibikorwa.
2>. Ihame ry'akazi
Inzira ifatika yo guhumeka ikubiyemo: guhumeka cyangwa kugabanura ibintu byabitswe mubice bya gaze → gutwara byihuse uduce duto twa gaze duhereye kumyuka ihumeka hejuru yubutaka bwa substrate → ibice bya gaze bihuza hejuru yubutaka kugirango nucleate, bikure muri firime ikomeye → kongera kubaka atome ya firime yoroheje cyangwa kubyara imiti ihuza imiti.
Substrate ishyirwa mucyumba cya vacuum ikanashyuha nuburwanya, urumuri rwa elegitoronike, laser nubundi buryo bwo guhumeka cyangwa kugabanya ibikoresho bya firime hanyuma bigahinduka ibice (atome, molekile cyangwa cluster) hamwe ningufu runaka (0.1 ~ 0.3eV). Ibice bya gaze bijyanwa muri substrate mukigenda cyumurongo usanga ahanini kitagongana, kandi bimwe mubice bigera hejuru yubutaka bigaragarira amaso, ikindi gice kikaba cyamamajwe kuri substrate kandi kigakwirakwira hejuru, bikaviramo kugongana-ibice bibiri hagati ya atome zabitswe kugirango bibe cluster, hanyuma bamwe bashobora kuguma hejuru yubutaka mugihe gito hanyuma bigahinduka. Ihuriro ry'uduce duto duhora duhura na diffuse ibice, haba kwamamaza cyangwa gusohora ibice bimwe. Iyi nzira isubirwamo inshuro nyinshi, kandi iyo umubare wibice byegeranijwe urenze agaciro kanini, bihinduka nucleus ihamye, hanyuma bigakomeza kuri adsorb no gukwirakwiza ibice hanyuma bigenda bikura buhoro buhoro, hanyuma amaherezo bigakora firime ikomeza yoroheje binyuze mumikoranire no guhuza nuclei ihamye.
3>. Ibipimo byingenzi
Umuvuduko wumwuka wumuyaga (PV): Umuvuduko aho imyuka yibintu byahumetse mubyumba bya vacuum iba iringaniye hamwe nikintu gikomeye cyangwa amazi mubushyuhe runaka. Isano iri hagati yumuvuduko wumwuka wumuyaga nubushyuhe bifite akamaro kanini muburyo bwa tekinoroji yo guhimba firime, ishobora kudufasha guhitamo neza ibikoresho byo guhumeka no kumenya imiterere yumwuka.
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