PECVD
PECVD (Plasma Enhanced Chemical Vapor Deposition) nubuhanga bukoreshwa mukubika firime zoroshye hejuru yubutaka.
Ihame rikubiyemo ahanini intambwe zikurikira:
1. Kumenyekanisha ibyabanjirije gaze:binyuze muri gaze yihariye (nka silane, ammonia, nibindi) mubyumba byerekana. Iyi myuka, mubihe bikwiye, izabora kandi ikore firime ikomeye.
2. Igisekuru cya plasma:Plasma ikorerwa mubyumba byerekana uburyo bwo gukoresha amashanyarazi yumuriro mwinshi cyangwa amashanyarazi ataziguye. Ubu buryo bushimisha molekile ya gaze, kuyitera ion no kubyara ibice byashizwemo (electron, ion, nibindi) nibice bitagira aho bibogamiye.
3. Imyitwarire yimiti:Mubikorwa bya plasma, prursor ya gaze ibora mubwoko bukora (nka atome, molekile, nibindi), bigira ingaruka hejuru yubutaka kugirango bibe firime yoroheje. Bitewe no kuba hari plasma, igipimo cyibisubizo mubisanzwe ni kinini kandi birashobora kubikwa mubushyuhe buke, bigatuma bikenerwa nibikoresho byangiza ubushyuhe.
4. Gushyira firime zoroshye:Ibinyabuzima bifatika byegeranya hejuru ya substrate hanyuma bigahinduka imiti kugirango ikore firime zikomeye. Mugihe cyo kubitsa, guhindura ibipimo nkubushyuhe, umuvuduko, na gazi bishobora kugira ingaruka kumiterere nimiterere ya firime.
5. Kugenzura ibiranga firime ntoya:Muguhindura ubwoko, umuvuduko wikigereranyo, umuvuduko wibisubizo hamwe nimbaraga za plasma za preursor, gushira ubwoko butandukanye bwa firime yoroheje, nka nitride ya silicon, okiside ya silicon, nibindi, birashobora kugerwaho kugirango bigenzure amashanyarazi, optique na mashini.
PECVD ikoreshwa cyane muri semiconductor, ibikoresho bya optoelectronic, imirasire y'izuba, hamwe nizindi nzego, kandi ihabwa agaciro kubwibyiza byayo muburyo bwiza bwa firime.
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