Kurya
Amahame shingiro yo gukama
1. Imyuka ya gazi **: Mugihe cyumye, imyuka nka fluoride na chloride ikoreshwa nkibisanzwe. Iyi myuka ikora hamwe nibikoresho bigomba gushirwa muri plasma kugirango bibe umusaruro uhindagurika.
2. Plasma generation **: Gazi ihindurwamo plasma hakoreshejwe radiyo yumurongo wa radiyo (RF) cyangwa microwave. Muri plasma, molekile ya gaze ioni kugirango ikore radicals na ion byubusa, zishobora kubyitwaramo neza nibikoresho.
3. Gutoranya guhitamo **: Kuma byumye birashobora kugera ku guhitamo gukomeye kandi birashobora guhitamo gukuramo ibikoresho byihariye mugihe ibindi bikoresho bidahindutse. Ibi nibyingenzi cyane mugutunganya ibintu bigoye.
Gushyira mu bikorwa byumye
- Gukora Semiconductor: Byakoreshejwe muburyo bwo kohereza kuri wafer ya silicon kugirango ibe izunguruka.
- Gukora MEMS: Gutunganya imiterere ya sisitemu ya mikorobe.
- Optoelectronics: Gukora ibikoresho bya optoelectronic nka laseri na detector.
01