CVD

Imiti ya Vapor Deposition (CVD) ni ubwoko bwa tekinoroji yo gutwika ihindura imyuka ya gaze mubikoresho bikomeye binyuze mumiti ya chimique ikabishyira hejuru yubutaka. Ihame ryibanze rya CVD nugukora firime yoroheje hejuru yubutaka hifashishijwe imiti nka pyrolysis, kugabanya, na okiside. Ikoranabuhanga rya CVD rifite ibyiza byo guhitamo ibintu byinshi, ubuziranenge bwa firime, hamwe nuburyo bworoshye.

Iterambere ry'ikoranabuhanga rya CVD ryatangiye mu ntangiriro z'ikinyejana cya 20, ariko ikoreshwa mu nganda ryibanze cyane mu kinyejana cya 20 kugeza hagati ya nyuma. Hamwe niterambere ryinganda ziciriritse, tekinoroji ya CVD yakoreshejwe cyane kandi itera imbere byihuse.

Hariho uburyo bwinshi bwo gutumura imyuka ya chimique, nkumuvuduko ukabije wumuyaga wumuyaga wumuyaga (APCVD), ububiko bwumuvuduko ukabije wumuyaga (LPCVD), ultrahigh vacuum chimic vapor (UHVCVD), ububiko bwa lazeri chimique (LCVD), ububiko bwa chimique PECVD)

Iterambere ryimyunyu ngugu ntirishobora gutandukana nibiranga, aribyo bikurikira.

I) Hariho ubwoko bwinshi bwo kubitsa: firime yicyuma, firime zitari ibyuma birashobora kubikwa, hamwe na firime nyinshi zivanze, kimwe na ceramic cyangwa compound compound birashobora gutegurwa nkuko bisabwa.

2) Imyitwarire ya CVD ikorwa kumuvuduko wikirere cyangwa vacuum nkeya, kandi itandukaniro ryikariso ni ryiza. Irashobora kuringaniza igorofa igaragara cyangwa ibyobo byimbitse hamwe nu mwobo mwiza mubikorwa.

3) Irashobora kubona firime yoroheje ifite isuku ryinshi, ubucucike bwiza, imihangayiko mike isigaye hamwe na kristu nziza. Bitewe no gukwirakwiza gaze ya reaction, ibicuruzwa bivamo reaction hamwe na substrate, hashobora kuboneka urwego rwa firime hamwe na adhesion nziza, rukaba ari ingenzi cyane muburyo bwo gutambuka hejuru, kwangirika kwangirika no kwambara.

4) Kubera ko ubushyuhe bwo gukura kwa firime yoroheje ari munsi cyane yo gushonga yibintu bya firime, hashobora kuboneka urwego rwa firime ifite isuku ryinshi hamwe na kristu yuzuye, bikaba bikenewe kuri firime zimwe na zimwe.

5) Muguhindura ibipimo byo kubitsa, imiterere yimiti, morphologie, imiterere ya kristu nubunini bwikigero gishobora kugenzurwa neza.

6) Ibikoresho biroroshye kandi byoroshye gukora no kubungabunga.

7) Ubushyuhe bwa reaction buri hejuru cyane, muri rusange 850 ~ 1100 and, kandi ibikoresho byinshi byubutaka ntibishobora kwihanganira ubushyuhe bwinshi bwa CVD. Plasma cyangwa laser ifashijwe tekinoroji irashobora gukoreshwa kugirango igabanye ubushyuhe.