ALD

Kubika Atomic Layeri (ALD) nuburyo bukomeye bwo kubika imyuka ihumeka (CVD). Ubuhanga bwo Kubitsa Amafirime Yoroheje Ubu ni tekinike yo kubitsa ibikoresho muburyo bwa firime imwe ya atom ishingiye kumyuka ya pompe yamashanyarazi ibice byurwego hejuru yubutaka. Imiti ibiri cyangwa myinshi ibanziriza imiti, buri kintu kirimo ibintu bitandukanye byibitswe, byinjizwa kimwekimwe hejuru yubutaka. Buri preursor yuzuza ubuso kugirango ikore monolayeri yibintu.

Ihame ryikura rya ALD risa nubushakashatsi bwikirere busanzwe (CVD), ariko muri ALD, ababanjirije reaction babishyira muburyo butandukanye mugihe cyo kubitsa, kandi imiti yimiti yibice bishya bya atome ifitanye isano itaziguye nigice cyabanjirije iki, hamwe nigice kimwe gusa cya atome zashyizwe kuri buri reaction. Kugira imiterere yikura yikintu ituma firime ishyirwa kuri substrate muburyo bumwe kandi nta pinholes. Kubwibyo, umubare wikizunguruka urashobora kugenzurwa kugirango ugere kugenzura neza ubugari bwa firime.

Ikoreshwa rya tekinoroji ya Atomic layer ibiranga ibyiza

Ubusobanuro buhanitse. Ubunini bwa substrate burashobora kugenzurwa byoroshye kandi neza mugucunga inzinguzingo, kandi ubunini bwa firime burashobora kuba bwuzuye nkubunini bwa atome.

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