Multi-function Composite Roll to Roll Vacuum Coating Machine

Machine Brief Description

Multi-function composite roll to roll vacuum coating machine

is a new type of coating equipment which can install different

coating technology in the single chamber at the same time to achieve a wider process recipe and get more coating functions. Available. combinations include: sputtering technology + evaporation metallizing, sputtering technology + PECVD, sputtering technology + arc technology, ion beam coating + sputtering technology, etc.

Machine Brief Description

. Stable in quality, large capacity
. Fast coating speed, good film uniformity
. Can choose both coating functions or single function
. Optimized design, easy to operate and do maintenance.
. Substrate width range from 350mm to 2050mm
. Low operating costs

TECHNICAL PARAMETER

Serial	JRCW、JRCP、JRCL
Technology	sputtering + evaporation metallizing, sputtering+PECVD,sputtering + arc, ion beam coating + sputtering, andtc.
Chamber size	Coating chamber can be designed upon different request
Substrate Material	Organic thin film such as PET / BOPP / PEN / PI / PC /PE, Fiber cloth; Paper roll;Foam;
Substrate width range	can be designed upon different technology request
Coating film	Conductive film such as Cu, Al, Ag, Cr, Ni, Au, Mo, Si, ITO and C; Alloy film such as NiCr, NiCu and InSn. Dielectric film such as SiO2,, Nb2O5, Al2O3, CrO, TiO2, NiO, CuO, SiNx and ZnO; function film such as AF coating
Vacuum system	Vacuum system select international famous brand or China famous brand molecular pumps (or diffusion pumps), polycold, mechanical pumps, etc.

APPLICATION FIELDS

This machine is widely used in many industries such as Lithium battery composite copper foil, composite aluminum foil, metal lithium coating, C film coating; FCCL(flexible copper clad laminate);Transparent conductive film, EMI; Solar cell absorption layer/electrode layer; High barrier film, optical film, thermal film, high reflective film and AF film.