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Machine Brief Description

The ICP Magnetron Optical Coating Machine is a new type of high speed, high efficiency and high quality sputter deposited optical multilayer coating machine designed to meet the needs of the modern optical and electronics industry for high performance films. It combines Inductively Coupled Plasma (ICP) technology with magnetron sputtering principle, which is capable of efficiently and uniformly depositing high quality multilayer optical films on a variety of substrates to meet the needs of different applications. It is widely used in optical devices, electronics, semiconductors and decorative coatings.

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Advanced ICP coating process of sputtering first and then ionisation can achieve higher deposition efficiency, better coating repeatability and better quality film layer, ensuring the optical performance and durability of the final product.

It can be designed as single chamber or multi-chamber structure according to the requirements, and equipped with automatic loading and unloading device to achieve higher production efficiency and lower operating costs.

If configured with evaporation coating system, it can also realise the preparation of AF/AS film.

Multi-layer film deposition capability, support for complex multi-layer film structure design, the ability to flexibly adjust the thickness of the film layer and the combination of materials according to customer needs, to meet different optical performance requirements.

Support for a variety of materials coating, including metal, oxide, nitride, etc., to adapt to different application requirements, to meet the diversified choices of customers.

Provide high-performance electrical insulation and conductive film in the semiconductor field, enhancing optical performance and durability in optical devices, as well as aesthetics and abrasion resistance in decorative coating, meeting the needs of high-tech products.

Technical Parameter

Series	CJX Series
Technology	Magnetron sputtering followed by ionisation
Chamber Size	Can be designed upon different request.
Substrate Material	Glass lenses; Plastic sheet/sheet;
Coating Film	AR; Supperhard AR; BBAR; High reflective film; UV/IR cutoff filter; Bandpass filter; Precise optical film such as color film; AF/AS;
Vacuum System	Vacuum system select international famous brand or China famous brand molecular pumps (or diffusion pumps), polycold, mechanical pumps, etc.

Frequently Asked Questions

What technology does the ICP Magnetron Optical Coating Machine use?

It combines Inductively Coupled Plasma (ICP) technology with the magnetron sputtering principle, utilizing an advanced process of sputtering first and then ionisation to achieve high-quality film deposition.

What are the main applications of this coating machine?

This machine is widely used for optical devices, electronics, semiconductors, and decorative coatings to meet the high-performance film needs of modern industries.

Can the chamber structure be customized for specific production requirements?

Yes, it can be designed as a single chamber or multi-chamber structure depending on requirements, and it can be equipped with an automatic loading and unloading device to improve efficiency.

What types of coating films can this system deposit?

It can prepare AR, Superhard AR, BBAR, High reflective film, UV/IR cutoff filters, Bandpass filters, precise optical films (such as color films), and AF/AS films (when configured with an evaporation coating system).

What substrate materials are compatible with the CJX Series?

The system is designed to work with various substrates, including glass lenses and plastic sheets.

What configuration options are available for the vacuum system?

The vacuum system can select international or Chinese famous brand molecular pumps (or diffusion pumps), polycold, mechanical pumps, and other high-performance components.