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Machine Brief Description

The Electron Beam Evaporation Optical Coating Machine is a high-efficiency monoblock type of machine that uses electron gun evaporation technology. It can be structured vertically or horizontally and has been specially designed for the deposition of optical multilayer films. The equipment can be supplied with a vertical or horizontal structure according to the customer's requirements, allowing it to be adapted to different production environments and space requirements. By employing electron beam heating technology, the material undergoes evaporation and is subsequently deposited onto the substrate's surface, resulting in the creation of a high-quality optical film. The exceptional quality and uniformity of the film render it an optimal selection for the fabrication of optical devices, electronic components, and a variety of other advanced technological products.

Key Features

High technological maturity and complete equipment specifications.
Configured with electron gun and ion source to realise ion-assisted evaporation coating process, with on-line film thickness monitoring system, real-time monitoring and adjusting the film thickness to ensure the precise control of each layer of film to meet the high standard production requirements.
Coating chamber size range from 500mm to 3500mm.
Flexible structural design, vertical or horizontal structure can be provided according to customer requirements, adapting to different production environments, convenient operation and maintenance.
High deposition rate, electron beam evaporation technology can achieve rapid film deposition, significantly improve production efficiency, suitable for mass production requirements.

Technical Parameter

Series	ZZS/ZSW Series
Technology	E-beam evaporation
Chamber Size	Can be designed upon different request.
Substrate Material	Glass; Plastic; Resin;
Coating Film	Antireflection film; High reflective film; Bandpass filter; Cutoff filter; Narrow band filter; Color decoration film; AF;
Vacuum System	Vacuum system select international famous brand or China famous brand molecular pumps (or diffusion pumps), polycold, mechanical pumps, etc.

Frequently Asked Questions (FAQ)

What is the primary technology used in this optical coating machine?

The machine utilizes advanced Electron Beam (E-beam) evaporation heating technology coupled with an ion source for ion-assisted deposition, ensuring highly uniform and precise optical thin film fabrication.

What types of optical films can the ZZS/ZSW series deposit?

This system is capable of depositing a wide range of optical coatings, including antireflection (AR) films, high reflective films, bandpass filters, cutoff filters, narrow band filters, color decoration films, and anti-fingerprint (AF) coatings.

Can the chamber size be customized for specific production requirements?

Yes, the coating chamber size ranges from 500mm to 3500mm and can be custom-engineered to meet different production capacities, space layouts, and substrate configurations.

What substrates are compatible with this E-beam evaporation system?

The machine is highly versatile and works efficiently with multiple substrate materials, such as various types of glass, plastic, and resin components.

How is the film thickness monitored and controlled?

It features an integrated online film thickness monitoring system that provides real-time monitoring and adjustment of the film growth, ensuring high precision for each layer of the multilayer stack.

What configurations are available for the vacuum pump system?

The vacuum system is highly customizable, utilizing top-tier international or Chinese brands for molecular pumps, diffusion pumps, polycold systems, and mechanical backing pumps to ensure rapid and stable vacuum levels.