Multi-Chamber Sputtering Roll to Roll Coating Machine
Machine Brief Description
It is a continuous roll-to-roll coating equipment which specially developed for high performance multiple layers products coating or high speed coating. There are single roller multiple chambers or double rollers multiple chambers. The single roller multiple chambers equipped with 6 cathode target positions, up to install 12 pieces cathodes. The double rollers multiple chambers can have 12 cathodes target positions, up to install 24 pieces cathodes. It can achieve multiple layers complex film or thick film coating. The multi-chamber vacuum sputtering roll-to-roll coating machine with more target positions. Its innovative features not only improve production efficiency but also ensure high-quality output, making it an essential tool for modern manufacturing processes.
product feature
- . The machine can be equipped with planar or rotating sputtering cathode according different customer requirement
- . Can be configured with rotating or flat sputtering cathode;
- . It can be equipped with DC or MF power supply used for reactive sputtering;
- . Double-roller multi-chamber equipment can be up to 12 target positions, max can be installed 24 cathodes, that can realize higher efficiency；
- . The coating chamber is well partitioned, which is suitable for multi layer coating process;
- . Large production capacity, strong stability, good repeatability and low operation cost.
TECHNICAL PARAMETER
| Serial | JRC |
| Technology | Sputtering Technology |
| Chamber size | Can be designed upon different request |
| Substrate Material | PET,BOPP, PEN, PI, PC, PE, and other organic films. Fiber cloth, tissue roll, foam, metal rolling material, flexible material such as ultra-thin glass |
| Coating film | Cu, Ag, Cr, Ni, Au, Mo, Si, ITO |
| Application | Lithium battery composite copper foil, FCCL (flexible copper clad laminate) Transparent conductive cloth, Electromagnetic shielding film, Solar cell absorption layer, electrode layer, Barrier film, heat dissipation film, high reflective film |
