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Multi-Chamber Mangnetron Sputtering Roll to Roll Coating Machine
Machine Brief Description
TS-JRC double roll multi vacuum chamber rolling coating machine is specially designed for high performance multi-layer coating. The machine has two chambers which can install 12 vacuum coating chambers, it can install 24 cathode which realize complicated or thick film coating.
product feature
- . This machine is designed by introduction of German technology and further improvement. The chamber keeps vacuum status when loading and unloading which can improve production efficiency, and can guarantee stable coating quality.
- . It can have 12 coating chambers, 24 sputtering target positions. The chambers have good interval.
- .The machine is suitable for coating multi-layer. It has the advantages of large output, stable, good repeatability and low operation cost.
- . It can be equipped with online film thickness or resistance detecting system, close-loop coating monitor system according to different coating process.
TECHNICAL PARAMETER
| Serial | JRC |
| Technology | Sputtering Technology |
| Chamber size | Can be designed upon different request |
| Substrate Material | Organic thin film such as PET/PEN/PI/PC/PE；Tissue；Cloth；Foam；Metal rolling material；Flexible material such as ultra-thin glass； |
| Coating film | Conductive film such as Cu、At、Al、Cr、In、At、And、THIS、C；Alloy metal film such as NiCr、NiCu、InSn；Media film such asNot.2 、Nb2THE5 、Al2THE3 、ZnO |
| Vacuum system | Vacuum system select international famous brand or China famous brand molecular pumps (or diffusion pumps), polycold, mechanical pumps, etc. |
